• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a piezoelectric actuator control device that can combine two types of control of a piezoelectric actuator, a voltage control and a load control. Switching between the load control and the voltage control is automatic, without addition of switching elements, depending on the nature of the voltage applied to the input of the assembly.
    公开号:FR3037454A1
    申请号:FR1555381
    申请日:2015-06-12
    公开日:2016-12-16
    发明作者:Issa Ouattara；Jean-Luc Gach；Philippe Amram
    申请人:Aix Marseille Universite；Centre National de la Recherche Scientifique CNRS；
    IPC主号:
    专利说明:

    [0001] FIELD OF THE INVENTION The invention lies in the field of piezoelectric actuator controls, and in particular relates to a control circuit which makes it possible to reduce the hysteresis of such actuators. STATE OF THE ART There are mainly two types of piezoelectric actuators: direct actuators in which the displacement obtained in the micrometer range is equal to the deformation of the piezoelectric material, and the amplified actuators in which a mechanical circuit amplifies the movement. and thus increase the displacement which is of the order of a millimeter. In these devices, an electric field is used to obtain a deformation of the piezoelectric material and to control the displacement. The control of an actuator may be a control voltage or load. U.S. Patent 4,263,527 to Comstock discloses a control device in charge of a piezoelectric actuator. U.S.7,015,621 B2 patent of Mizuuchi discloses a device for controlling the voltage of a piezoelectric actuator. Although being the most common and simple solution to implement, the voltage control has a major disadvantage in that the displacement of the actuator, which is a function of the applied voltage, is not linear. This in particular is due to variations in the physical parameters of the piezoelectric material, creep and hysteresis. Creep (creep) is a slow drift of material deformation as a function of time, which results in slow elongation of the actuator under a constant tension and which leads to establishes a few percent per decade of time of the initial displacement instruction. 5 Hysteresis (or hysteresis) is the property of a system that tends to remain in a certain state when an external cause that has produced the change of state has ceased. The piezoelectric actuators have a hysteresis between the applied voltage and the generated displacement. This non-linearity can vary between 10 and 20% depending on the nature of the material, and the displacements of a piezoelectric actuator are not the same depending on whether it is an increasing voltage or a decreasing voltage applied thereto. There are solutions to improve the behavior of piezoelectric actuators, in particular to reduce the hysteresis. The patent application FR2850219 of J. Agnus et al. discloses a combined voltage and load control device for a piezoelectric actuator that provides linear open-loop static behavior, thereby reducing hysteresis. However, the circuit requires the addition of switch and interrupt means to zo switch from one control mode to another. There is then the need for a solution that overcomes the disadvantages of known approaches. The present invention meets this need. SUMMARY OF THE INVENTION An object of the present invention is to provide a system that can combine two types of control of a piezoelectric actuator, a voltage control and a load control, wherein the switching between the load control and the Voltage control is automatic, depending on the nature of the voltage applied to the input of the circuit. Advantageously, the device of the present invention is simple to implement and inexpensive, using no other external circuit for controlling the piezoelectric actuators. Advantageously, the gain of the device is the same at low and high frequency thanks to the adaptation of the capacitive or resistive bridge. The gain of the amplifier is set by the resistors at low frequency or even continuously, while in high frequency, the gain is set by the capacitance of the capacitors formed by the piezoelectric actuator and the capacitor 10 called reference capacitor Cref. Thus, starting from the inherent capacitance Cpzt of the piezoelectric actuators, given by the manufacturers, and the desired gain, it is very easy to size the components of the resistive bridges (Rpzt, RCref) and capacitive bridges (Cpzt, Cref) since the gain Av is given by the relation Cref / Cpzt = Rp7f / Rcref. Another advantage of the invention is that the hybrid amplifier can operate with any type of piezoelectric actuator for which there is no need to know the equivalent hysteresis model. The hybrid amplifier thus controls any open-loop piezoelectric actuator because the voltage-displacement characteristic is made substantially linear. Advantageously, the output voltage of the hybrid amplifier is taken across the piezoelectric actuator and not across the set (Cpzt, Rpzt, Cref, RCref), in which case the hysteresis is not attenuated. In a preferred embodiment, the piezoelectric actuator control device of the invention comprises: an operational amplifier having an inverting input and a non-inverting input, and an output for providing an output voltage; a capacitive circuit comprising a piezoelectric actuator and a capacitor in series, said capacitive circuit being connected by the free end of the piezoelectric actuator to the output of the operational amplifier and by the free end of the capacitor to a terminal of low voltage; a resistive circuit comprising a first resistor and a second resistor in series, said resistive circuit being connected by the free end of the first resistor to the output of the operational amplifier and by the second resistor to a low voltage terminal; the device being characterized in that the inverting input of the operational amplifier is connected to the common ends of the piezoelectric actuator and the capacitor, and to the common ends between the first and the second resistor, the capacitive circuit and the resistive circuit forming an impedance bridge. Advantageously, the ratio of the impedances of the capacitive circuit is equal to the ratio of the impedances of the resistive circuit.
    [0002] In an operating mode, a control signal at a given frequency applied to the non-inverting input of the operational amplifier provides control of the piezoelectric actuator.
    [0003] In another mode of operation, a continuous control signal applied to the non-inverting input of the operational amplifier makes it possible to obtain a voltage control of the piezoelectric actuator.
    [0004] In one embodiment, the operational amplifier is powered between -60V and + 160V.
    [0005] In an alternative embodiment, the device of the invention comprising unidirectional transils diodes connected to the terminals of the piezoelectric actuator to limit the voltage at said terminals. The voltage across the piezoelectric actuator can be limited to + 150V and -20V, respectively. In another variant, the device of the invention further comprises a resistor connected to the output of the operational amplifier 10 to limit the current delivered in the piezoelectric actuator. The invention also covers an interferometer controlled by a control device as described. Advantageously, the interferometer may be a Fabry-Perot interferometer.
    [0006] Piezoelectric actuators are used in various fields for various purposes such as active vibration control for assistance in machining industrial parts, control in microscopes of small displacements for scanning a surface to be probed, the control of automobile injectors, the production of fine droplets in the printers, the adjustment of the length of a laser cavity in opto-acoustics or even the micro-positioning of mirrors in astronomy.
    [0007] DESCRIPTION OF THE FIGURES Various aspects and advantages of the invention will appear in support of the description of a preferred embodiment of the invention, but without limitation, with reference to the figures below: FIG. voltage control device of the prior art; Figure 2 illustrates a control device in charge of the prior art; Figure 3 illustrates a hybrid controller according to one embodiment of the invention; FIG. 4 illustrates an exemplary implementation of the device of the invention.
    [0008] DETAILED DESCRIPTION OF THE INVENTION FIG. 1 illustrates a voltage control device known from the prior art. The principle of the voltage control is to apply a voltage Vs across a piezoelectric actuator (10) through an amplifier (12). The circuit comprises a piezoelectric actuator (10) connected at the output of an operational amplifier (12). The amplifier (12) is mounted in a non-inverting arrangement, and receives at a first input a control voltage V. A first resistor R1 (14) is connected between the output of the amplifier (12) and a second input of the amplifier. A second resistor R2 (16) is connected between the second input of the amplifier and a low voltage Vo. The output voltage Vs of the amplifier (12) is proportional to its control voltage Vc according to the relationship: Vs = 1+ 1.17 ,. (1) R2 7 3037454 The voltage gain Av of the amplifier (12) is constant and defined by the resistors R1 and R2 (14, 16) according to the equation: VR Av = - '= (2) V, R2 The frequency response of the circuit is given by the following equation: f = Is (3) 271-crztv, where Is is the output current of the amplifier (12) traversing the actuator (10) and Cpzt the value of capacitance of the actuator. Thus, the frequency 1 'depends on the current Is and on the output voltage V. In general, the output current is limited to a value (noted which fixes the value of the maximum frequency.) This type of control has the drawback hysteresis rather high, and is not suitable for controlling systems that require micropositionings, such as the very precise displacements of mirrors in the field of optics, for example. The principle of charge control is to apply a constant amount of charge to the electrodes of a piezoelectric actuator in order to obtain a linear behavior between the control and the displacement caused. FIG. 2 comprises a piezoelectric actuator (20) connected between the output 'OUT' and the inverting input (-) of an operational amplifier (22), the assembly presenting the configuration ion of a non-inverting assembly. An input voltage Vc is applied to the second non-inverting input (+) of the amplifier. A so-called reference capacitor (24) is connected in series with the piezoelectric actuator (20) to the inverting input. It has a voltage Vcref at its terminals. The capacity capacitor Cref receives a quantity of charge Qref proportional to the voltage across its terminals.
    [0009] In a load control circuit, the deformation of the piezoelectric actuator is linear as a function of the electrical load. Those skilled in the art will be able to refer to the work of J. Agnus, "Study, Realization, Characterization and Control of a Piezoelectric Micropince", University of Franche-Comté, which describes in more detail this relation and shows that the application of a constant quantity of charges on the electrodes of a piezoelectric actuator makes it possible to obtain a linear behavior between the control and the displacement caused. Although this type of circuit allows the hysteresis to be reduced appreciably, typically by a factor of 10, J. Agnus has demonstrated in the aforementioned article that this arrangement does not allow the long-term maintenance of the charges initially. applied, and thus maintaining a constant linear deformation of the piezoelectric actuator. It does not remove creep.
    [0010] In static or continuous mode, there is saturation of the operational amplifier. Indeed, the frequency of the control signals is zero, and the impedance of the capacitors is infinite, these then behave like open circuits. Under these conditions, the capacitor Cref (24) and the actuator (20) are in open circuit and the assembly behaves like a voltage comparator, causing saturation of the operational amplifier. In dynamic mode, the frequency of the output signal across the actuator (20) depends solely on the value of the output current and the input voltage Vc of the amplifier.
    [0011] Referring to FIG. 2, the piezoelectric actuator (20) may be replaced by an equivalent circuit which is a capacitor 'Cm' having an impedance Zp (p) = 1 / p. Cpzt Further considering, 'ZR (p)' the impedance of the reference capacitor (24) Cref, the operational amplifier (22) being in linear operation, the impedances ZR (p) and Zp (p) being in series They then form a voltage divider. The expression of the input voltage / c (p) is given by the relation: ZR (p) Ve (P) = Vs (P) (4) ZR (P) + ZR (P) The function of resulting transfer F (p) is: (5) F (p) = Vs (P) = ZR (P) + Zp (P) (I)) ZR (p) By replacing ZR (p) and Zp (p) ) by their respective expression, we obtain: 1 1 + PCF (p) = 'pf C p' 1 PC 'f (6) 15 Which gives after simplification: (7) C + CF (p) = ref PZt C pzt The voltage at the terminals of the actuator (20) is then: vpe (P) = 17, (p) -17, (p) -17, (1,) cp, (8) 20 Thus, in dynamics, the gain of the amplifier in charge therefore only depends on the inherent capacitance value of the piezoelectric actuator and the capacitor in series with the latter. Considering the capacitance of the fixed reference capacitor, that of the actuator varies according to certain parameters including the voltage at its terminals. The expression of the operating frequency of the amplifier is then given by the equation: is f = 2 it-Ve C'f (9). The person skilled in the art finds that the frequency of the output signal, therefore at the The limits of the piezoelectric actuator depends solely on the value of the output current is and the input voltage Ve of the amplifier. Thus, this type of load-controlled circuit has the disadvantage of having a creep effect and not allowing a continuous control. FIG. 3 illustrates a hybrid control device according to one embodiment of the invention, combining the two control modes, in load and in voltage.
    [0012] The device (300) combines a first circuit (302) for load control control with a second circuit (304) for voltage control control, the two circuits being coupled to an operational amplifier (30). Advantageously, the hybrid arrangement of the invention allows switching between the two charge / voltage modes to be done automatically. The amplifier (30) receives an input voltage Ve on a first non-inverting input (+), and outputs 'OUT' an output voltage Vs.
    [0013] The first circuit (302) comprises a piezoelectric actuator (32) and a capacitor (34) in series. The piezoelectric actuator (32) is connected to the 'OUT' output and to the inverting input of the operational amplifier (30). The capacitor (34) in series is connected to the inverting input of the operational amplifier and to a low voltage Vo. The first circuit is a capacitive circuit comprising a piezoelectric actuator and a capacitor in series, said capacitive circuit being connected by the free end of the piezoelectric actuator to the output of the operational amplifier and by the free end of the capacitor to a low voltage terminal. The second circuit (304) includes a first resistor (36) and a second resistor (38) in series. The first resistor (36) is connected to the 'OUT' output and to the inverting input of the operational amplifier (30). The second resistor (38) is connected to the inverting input of the operational amplifier and to a low voltage Vo. The second circuit is a resistive circuit comprising a first resistor and a second resistor in series, said resistive circuit being connected by the free end of the first resistor to the output of the operational amplifier and by the second resistor to a terminal of low voltage. The low voltage may preferentially be brought back to the ground.
    [0014] The inverting output (-) of the amplifier (30) corresponds to a common 'Pu' connection point between the two capacitive (302) and resistive (304) circuits. The connection point Pc is common between the actuator (32) and the capacitor (34) for the first circuit (302), and between the first resistor (36) and the second resistor (38) for the second circuit (32). 304). The common connection point 'Pu' has a voltage denoted VCref '. Thus, the device is characterized in that the inverting input of the operational amplifier is on the one hand connected to the common ends of the piezoelectric actuator and capacitor, and secondly connected to the common ends between the first and second resistor, the capacitive circuit and the resistive circuit forming an impedance bridge.
    [0015] The device of the invention thus provides an impedance bridge formed by the capacitors (32, 34) of the first circuit (302) and the first and second resistors (36, 38) of the second circuit (304). The equilibrium of this bridge is satisfied when: C pzt Rref (10) where C ref R pzt 10 - Cpzt represents the inherent capacity of the piezoelectric actuator (32); Cref represents the capacity of the capacitor (34); - Rp7t and Rref respectively represent the first and second resistors of the second circuit (304).
    [0016] In the Laplace domain, the output voltage Vs (p) of the amplifier and the voltage across the piezoelectric actuator Vp, t (p), are expressed respectively by equations (11) and (12). following: 1+ RC ref * R pzt (CC ref ± C pzt) p Rc f + R Rc + RV s (p) = RCrej Pzt * ref pzt 1+ R pzt * C pzt Rcref * V (p) (1 1 ) Rc Vpzt (P) = Vs (P) -Ve (P) = ref 1+ (R * (* C pzt) p where the parameters represent: RPz t ± (R pzt * Cc ref) p (12) 13 3037454 - 'p' the Laplace variable - `Cpzt 'the inherent capacity of the piezoelectric actuator -` 1 = Ipzt' the resistance in parallel with the actuator - `Ccref the capacitance of the reference capacitor; `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` `` Ae of the input voltage Ve (t) considered s and the value of the capacitance of the reference capacitor Cref, according to the following equation: f = 2 * 71- * iAs.e. * Ccref (13) Considering equation (12), the man of the art states that for a given input voltage, when `p 'tends to 0, the gain of the transfer function tends to` Rpzt / Rcref' and when `p 'goes to infinity the gain of the transfer function tends to `CCref / Cpzt '. From a physical point of view, when the frequency tends to 0, capacitors Cpzt (32) and Cref (34) are equivalent to open circuits. The output current flows only through the resistors Rpzt (36) and `Rcref '(38). In this mode, the device behaves like a voltage control circuit. When the frequency tends to infinity, capacitors Cpzt (32) and Cref (34) are equivalent to short circuits. All of the output current flows through these two capacitors. In this mode, the device behaves like a load control circuit.
    [0017] Advantageously, at the extreme frequencies, low and high frequencies, there is no phase difference between the input and output signals. The gain at low frequencies is set by the resistors (36,38) while at high frequencies it is fixed by the capacitors (32,34).
    [0018] 5 The output current `is' is given by the following equation: * d [v (0]) ± .17, (t) + s (t) = (CCrej () (14) dt Rc'f The constant The time of the assembly is: t = Rpzt * Cpzt (15) In order for the commutation of the load and voltage control modes to be automatic, the voltage gains at low and high frequency must be equal. Equal voltage gains are satisfied, the behavior of the device of the invention is as follows: After the application of a control signal at a given frequency, the piezoelectric actuator moves to a certain position , with a reduced hysteresis It is the mode of control in charge with the capacitive part of the first circuit (302), composed of Cref and Cpzt which is put in play. Then, in steady state, with the application of a continuous signal, the resistive portion of the second circuit (304) composed of Rpzt and Rref is in operation. Since the gains in load and voltage control are identical, the voltage across the piezoelectric actuator (32) is constant.
    [0019] Advantageously, the actuator no longer moves, the displacement being maintained stable. There is therefore more creep unlike known load control devices. The control of piezoelectric actuators for Fabry-Perot interferometers must meet precise positioning requirements. Indeed, these piezoelectric actuators must ensure the displacement and alignment of the interferometer blades for a 0-200pm stroke with a positioning accuracy of the order of one nanometer, a very high reproducibility of the positioning (very low hysteresis ) and a linearity error, as well as very weak drifts (very low creep). The device of the present invention makes it possible to meet these requirements. FIG. 4 illustrates an exemplary implementation of the device of the invention for an application to the control of mobile mirrors in Fabry-Perot interferometers. The hybrid control device as detailed in FIG. 3, is represented in FIG. 4 by the references (40) for the operational amplifier, (42) for the piezoelectric actuator Cp, t, (44) for the capacitor of FIG. reference Cref, (46) and (48) respectively for the first 20 and second resistors. Various conventional application electronic components for those skilled in the art are added around the device of the invention to allow the desired operational operation. Thus, without being limiting, capacitors (C1, C2, C3, C4) can be added to enable decoupling of the supply voltages (+ Vcc, -Vcc), unidirectional transils diodes (D1, D2). ) to limit the voltage across the piezoelectric actuator (42). A resistor RH can be added to limit the current delivered in the actuator and a phase compensation capacitor Cui-13. Diodes (D3, D4) for protecting the differential input of the amplifier (40) can be added, as well as transil diodes (D5, D6) to protect the circuit against overvoltages and polarity reversals of the amplifiers. supply voltages.
    [0020] In a preferred embodiment, the amplifier may be a high voltage amplifier supplied between -60V and + 160V, the voltage across the actuator limited to + 150V and -20V respectively, the current delivered in the actuator limited to 130 mA . The table below reports the results of the comparison of the 10 hysteresis curves obtained with an operational gain amplifier 20 controlling several piezoelectric actuators, by a conventional voltage control, and by a hybrid control according to the device of the present invention. The piezoelectric actuators used have the following characteristics: Parameter Value Unit Supply voltage (Vp7t) -20 to +150 V Max. no load (Appzt) 344 IIM Inherent Capacity Cpzt 10 Free-Free Resonance Frequency (Frpzt) 2738 Hz Free-Resonance Frequency (Frpzt) 634 Hz Free-Free Response Time (trpzt) 0.18 MS Blocked Response Time -free (trpzt) 0.79 MS Resolution 3.44 nm Weight (Mpzt) 47.5 g 17 3037454 Stiffness (Kpzt) 0.55 N / prn Blocking force 189 N Temperature variation index (kt) 3.38 Hysteresis (H) 16 <H <20% Drift factor Not specified The comparison in the table below is given for measurements taken on three piezoelectric actuators. Actuator Hysteresis Hysteresis Hybrid amplifier Voltage reduction control factor 1 19.01% 0.76% 96.00% 2 19.42% 0.85% 95.62% 3 16.82% 0.23% 98.63% On the last column, it can be appreciated the significant decrease in hysteresis whatever the actuator. Indeed, the voltage controls (2nd column) result in a hysteresis of the order of 20% of the total amplitude of the displacement of the piezoelectric actuators while for the hybrid amplifier (3rd column) Io this same hysteresis is reduced to about 1%. Thus, the present description illustrates various non-limiting implementations of the invention. The examples have been chosen to allow a good understanding of the principles of the invention, but are in no way exhaustive and should allow the skilled person to make modifications and implementation variants while maintaining the same principles. It is shown that the hybrid amplifier of the invention can significantly reduce the hysteresis amplitude of the piezoelectric actuators. The proposed device thus makes it possible to linearize the displacement of an actuator as a function of the voltage applied across its terminals or of the setpoint voltage. Another advantage of the device of the invention is that it does not require a hysteresis model (Preisach, Maxwell, ...) and can therefore operate with any piezoelectric actuator, within the limits of the electronic assembly. The only parameters to be known for its implementation are the inherent capacity of the piezoelectric actuator at rest and its bandwidth, such data being generally available in the catalogs of manufacturers of piezoelectric actuators. The application areas of the hybrid amplifier of the invention may be, for example, nano and micropositioning, mechatronic applications or the field of virtual reality. 19
    权利要求:
    Claims (9)
    [0001]
    REVENDICATIONS1. A piezoelectric actuator control device comprising: - an operational amplifier having an inverting input and a non-inverting input, and an output for outputting an output voltage; a capacitive circuit comprising a piezoelectric actuator and a capacitor in series, said capacitive circuit being connected by the free end of the piezoelectric actuator to the output of the operational amplifier and by the free end of the capacitor to a voltage terminal low; a resistive circuit comprising a first resistor and a second resistor in series, said resistive circuit being connected by the free end of the first resistor to the output of the operational amplifier and by the second resistor to a low voltage terminal; the device being characterized in that the inverting input of the operational amplifier is connected to the common ends of the piezoelectric actuator and the capacitor, and to the common ends between the first and the second resistor, the capacitive circuit and the resistive circuit forming an impedance bridge.
    [0002]
    2. The device according to claim 1 wherein the impedance ratio of the capacitive circuit is equal to the ratio of the impedances of the resistive circuit.
    [0003]
    3. The device of claim 1 wherein a control signal at a given frequency applied to the inverting input of the operational amplifier provides control of the piezoelectric actuator.
    [0004]
    4. The device according to any one of claims 1 to 3 wherein a continuous control signal applied to the non-inverting input of the operational amplifier provides a voltage control of the piezoelectric actuator. 10
    [0005]
    5. The device according to any one of claims 1 to 4 wherein the operational amplifier is supplied between -60V and + 160V.
    [0006]
    6. The device according to any one of claims 1 to 5 further comprising unidirectional transils diodes connected across the piezoelectric actuator to limit the voltage at said terminals.
    [0007]
    7. The device of claim 6 wherein the voltage across the piezoelectric actuator is limited to + 150V and -20V, respectively.
    [0008]
    8. The device of claim 7 further comprising a resistor connected to the output of the operational amplifier 25 to limit the current output in the piezoelectric actuator.
    [0009]
    9. An interferometer controlled by a device according to any one of claims 1 to 8, wherein the interferometer may be a Fabry-Perot interferometer.
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    优先权:
    申请号 | 申请日 | 专利标题
    FR1555381A|FR3037454B1|2015-06-12|2015-06-12|PIEZOELECTRIC ACTUATOR CONTROL DEVICE|FR1555381A| FR3037454B1|2015-06-12|2015-06-12|PIEZOELECTRIC ACTUATOR CONTROL DEVICE|
    EP16730318.9A| EP3308409A1|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
    KR1020187001063A| KR20180032556A|2015-06-12|2016-06-10|Device for controlling piezoelectric actuators|
    JP2017564641A| JP2018520514A|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
    CN201680040955.7A| CN107924983B|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
    CA2989250A| CA2989250A1|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
    US15/735,443| US10389277B2|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
    PCT/EP2016/063355| WO2016198639A1|2015-06-12|2016-06-10|Device for controlling a piezoelectric actuator|
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